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半导体加工工艺和半导体制程设备

Author(s)：
张旭光

Publication Title：

Wen Yuan (Middle School Edition) 2019 No.10

Affiliations：
中芯国际集成电路(天津)有限公司天津 300110

Abstract：
自从我国实行改革并对外开放之后,社会各行各业都取得了卓越的进步.尤为显著的是社会经济及文化,在当今形势下都取得了很大程度的发展.本文在新时代的经济文化背景下,对半导体的加工技术和设备的若干方面进行了细致的分析和探究,希望能够在此过程中,了解当前半导体行业的发展形势,为其提供有效的建议并对未来的发展提供方向.本文主要对半导体的有关内容进行了分析,对半导体制作工艺及其设备进行了深入的探讨和研究.

Keywords：
半导体;加工工艺;制程设备

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[1] 张旭光.半导体加工工艺和半导体制程设备[J].Wen Yuan (Middle School Edition),2019(10),.

文渊(中学版)

Wen Yuan (Middle School Edition)

Language: 中文

CN：11-9275/G

ISSN：2096-627X

Publication Frequency: 月刊

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