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Home > Wen Yuan (High School Edition) > 2021 No.10 > SOI硅压阻式压力敏感芯体填充硅油含气量影响分析

  • SOI硅压阻式压力敏感芯体填充硅油含气量影响分析

    Author(s)：

    乔鑫

    Publication Title：

    Wen Yuan (High School Edition) 2021 No.10

    Affiliations：

    中国电子科技集团公司第四十九研究所

    Abstract：

    在SOI硅压阻式压力敏感芯体生产过程中，如工序控制不当引入空气，会对敏感芯体压力传递造成影响。为了研究具体影响情况，文章以敏感芯体为研究对象，概述了其结构，分析了填充硅油含气量对压力敏感芯体输出的影响机理，以供参考。

    Keywords：

    SOI硅压阻式压力敏感芯体；硅油；含气量；输出；影响

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    [1] 乔鑫.SOI硅压阻式压力敏感芯体填充硅油含气量影响分析[J].Wen Yuan (High School Edition),2021(10),.

文渊(高中版)
Wen Yuan (High School Edition)

Language: 中文

CN：11-9276/G

ISSN：2096-6288

Publication Frequency: 月刊

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